Unlock Precision Handling at Scale — SEMIXICON “ExaLar” Series Extra-Large Porous Vacuum Chuck Tables

Unlock Precision Handling at Scale — SEMIXICON “ExaLar” Series Extra-Large Porous Vacuum Chuck Tables

SEMIXICON proudly introduces the "ExaLar" Series, a new generation of extra-large porous vacuum chuck tables engineered for high-precision applications in Flat Panel Display (FPD), OLED, Thin Film Deposition, Optical, Laser Processing, Glass Substrate, Solar, and Medical Device manufacturing.

Designed with uniform vacuum distribution, ultra-flat surface tolerance, and high structural rigidity, the ExaLar Series ensures exceptional planarity, repeatability, and particle-free handling of large and delicate substrates.

With customizable dimensions ranging from 500mm × 500mm up to 3000mm × 3000mm, these vacuum chuck tables provide unmatched scalability for next-generation production environments.

Key Features:

Ultra-flat porous ceramic surface for stable substrate support

Excellent vacuum uniformity and airflow control

Customizable material options (Aluminum, Ceramic, SiC)

Precision machining for tight flatness and parallelism tolerances

Ideal for FPD, OLED, Glass, and Thin Film processing tools

www.semixicon.com

sales@semixicon.com

#porousvacuumchuck #largevacuumtable #FPDhandlingsystem #OLEDsubstratechuck #thinfilmvacuumstage #opticalalignmenttable #largeareachuck #glasssubstrateprocessing #precisionvacuumfixture #vacuumclampingtable


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